Effects of Composition and Thermal Annealing on the Mechanical Properties of Silicon Oxycarbide Films Submitted by duping812 on Tue, 08/28/2012 - 01:45 research thin film nanoindentation hardness residual stress Modulus SiOC oxycarbide Stoney's equation annealing Sensors and Actuators A: Physical Vol 176, Page 90-98. http://dx.doi.org/10.1016/j.sna.2012.01.002 Read more about Effects of Composition and Thermal Annealing on the Mechanical Properties of Silicon Oxycarbide FilmsLog in or register to post comments4462 views
