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SiOC
Effects of Composition and Thermal Annealing on the Mechanical Properties of Silicon Oxycarbide Films
Mon, 2012-08-27 21:45 -
duping812
research
thin film
nanoindentation
hardness
residual stress
Modulus
SiOC
oxycarbide
Stoney's equation
annealing
Sensors and Actuators A: Physical
Vol 176, Page 90-98.
http://dx.doi.org/10.1016/j.sna.2012.01.002
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about Effects of Composition and Thermal Annealing on the Mechanical Properties of Silicon Oxycarbide Films
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