thin film

Abstract: Flexible electronic devices often require hermetic coatings that can withstand applied strains. This paper calculates the critical strains for various configurations of channel cracks in a coating consisting of organic and inorganic layers. We show that the coating can sustain the largest strain when the organic layer is of some intermediate thicknesses.

Flexible electronics are promising for diverse applications, such as rollable displays, conformal sensors, and printable solar cells. These systems are thin, rugged, and lightweight. They can be manufactured at low costs, for example, by roll-to-roll printing. The development of flexible electronics has raised many issues concerning the mechanical behavior of materials. This paper examines a particular issue: channel cracks in hermetic coatings.

Electronic devices (e.g., organic light-emitting devices, OLEDs) often degrade when exposed to air. Developing hermetic coatings has been a significant challenge. Organic films are permeable to gases, and inorganic films inevitably contain processing flaws, so that neither by themselves are effective gas barriers. These considerations have led to the development of multilayer coatings consisting of alternating organic and inorganic films. To be used in flexible electronics, these coatings must also withstand applied strains without forming channel cracks...

Teng Li, Zhenyu Huang, Zhichen Xi, Stephanie P. Lacour, Sigurd Wagner, Zhigang Suo, Mechanics of Materials, 37, 261-273 (2005).

Under tension, a freestanding thin metal film usually ruptures at a smaller strain than its bulk counterpart. Often this apparent brittleness does not result from cleavage, but from strain localization, such as necking. By volume conservation, necking causes local elongation. This elongation is much smaller than the film length, and adds little to the overall strain. The film ruptures when the overall strain just exceeds the necking initiation strain, ε_N , which for a weakly hardening film is not far beyond its elastic limit. Now consider a weakly hardening metal film on a steeply hardening polymer substrate. If the metal film is fully bonded to the polymer substrate, the substrate suppresses large local elongation in the film, so that the metal film may deform uniformly far beyond ε_N. If the metal film debonds from the substrate, however, the film becomes freestanding and ruptures at a smaller strain than the fully bonded film; the polymer substrate remains intact. We study strain delocalization in the metal film on the polymer substrate by analyzing incipient and large-amplitude nonuniform deformation, as well as debond-assisted necking. The theoretical considerations call for further experiments to clarify the rupture behavior of the metal-on-polymer laminates.

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R. Huang, Applied Physics Letters 87, 151911 (2005).

Low dielectric constant (low-k) is achieved often at the cost of degraded mechanical properties, making it difficult to integrate the dielectric in the back end of line (BEOL) and to package low-k chips. Development of low-k technology becomes costly and time-consuming. Therefore, more frequently than before, people resort to modeling to understand mechanical issues and avoid failures. In this paper we present three multilevel patterned film models to examine channel cracking in low-k BEOL. The effects of copper features, caps and multilevel interconnects are investigated and their implications to BEOL fabrication are discussed.

Low-k BEOL Mechanical Modeling
Liu, Xiao Hu; Lane, Michael W; Shaw, Thomas M; Liniger, Eric G; Rosenberg, Robert R; Edelstein, Daniel C
Advanced Metallization Conference 2004 (AMC 2004); San Diego, CA and Tokyo; USa and Japan; 19-21 Oct. 2004 and 28-29 Sept. 2004. pp. 361-367. 2005

Teng Li, Zhigang Suo, Stephanie P. Lacour, Sigurd Wagner

Journal of Materials Research, 20, 3274-3277 (2005)

Rui Huang and Se Hyuk Im, Physical Review E 74, 026214 (2006).

A stressed thin film on a soft substrate can develop complex wrinkle patterns. The onset of wrinkling and initial growth is well described by a linear perturbation analysis, and the equilibrium wrinkles can be analyzed using an energy approach. In between, the wrinkle pattern undergoes a coarsening process with a peculiar dynamics. By using a proper scaling and two-dimensional numerical simulations, this paper develops a quantitative understanding of the wrinkling dynamics from initial growth through coarsening till equilibrium. It is found that, during the initial growth, a stress-dependent wavelength is selected and the wrinkle amplitude grows exponentially over time. During coarsening, both the wrinkle wavelength and amplitude increases, following a simple scaling law under uniaxial compression. Slightly different dynamics is observed under equi-biaxial stresses, which starts with a faster coarsening rate before asymptotically approaching the same scaling under uniaxial stresses. At equilibrium, a parallel stripe pattern is obtained under uniaxial stresses and a labyrinth pattern under equi-biaxial stresses. Both have the same wavelength, independent of the initial stress. On the other hand, the wrinkle amplitude depends on the initial stress state, which is higher under an equi-biaxial stress than that under a uniaxial stress of the same magnitude.

A recent discussion here about the effect of surface stress on vibrations of microcantilever has gained some interest from our members. A few years ago, Zhigang and I looked at surface effect on buckling of a thin elastic film on a viscous layer (Huang and Suo, Thin Solid Films 429, 273-281, 2003). Although the physical phenomena (buckling vs vibrations) are different, the conclusion is quite consistent with Wei Hong and Pradeep's comments toward the end of the discussion. That is, surface stress only contributes as a residual stress and thus does not affect the buckling wavelength (frequency in space in analogy to frequency in time for vibrations).

One of the most common forms of cohesive failure observed in brittle thin film subjected to a tensile residual stress is channel cracking, a fracture mode in which through-film cracks propagate in the film. The crack growth rate depends on intrinsic film properties, residual stress, the presence of reactive species in the environments, and the precise film stack. In this paper, we investigate the effect of various buffer layers sandwiched between a brittle carbon-doped-silicate (CDS) film and a silicon substrate on channel cracking of the CDS film.