Electro-Mechanical Analysis of MEMS Devices with CoventorWare and Abaqus
The computational analysis of MEMS (Micro Electro Me-chanical systems) devices poses distinctive challenges, requiring software that provides flexible modeling tools, enables the coupling of multiple physical phenomena, and considers the integration of the devices into their macro-scale surroundings. To meet these requirements, Abaqus partners with developers of commercially available MEMS software by providing the necessary finite element analy-sis capabilities to these packages.