You may want to take a look of this newly published book entitled Mechanics of Microelectronics, which is
Series: Solid Mechanics and Its Applications , Vol. 141
Springer, May 2006
authored by G.Q. Zhang, W.D. van Driel, and X.J. Fan http://www.springer.com/east/home/engineering?SGWID=5-175-22-165281764-detailsPage=ppmmedia|toc