Fracture Resistance of Silicon With Nano Scratch Testing

Scratch testing, using nano loads, has become widely used for the study of adhesion strength and marring resistance of thin films and coatings. This same test can also be used to study fracture behavior on brittle substrates similar to a marring resistance test approach. This can provide an in-depth observation of failure on delicate substrate materials at precisely controlled and recorded loads.

Application Note: http://www.nanovea.com/Application%20Notes/fracture-resistance.pdf