Nano Lett., 2012, 12 (1), pp 505–511
Rechargeable, all-solid-state Li ion batteries (LIBs) with high specific
capacity and small footprint are highly desirable to power an emerging
class of miniature, autonomous microsystems that operate without a
hardwire for power or communications. A variety of three-dimensional
(3D) LIB architectures that maximize areal energy density has been
proposed to address this need. The success of all of these designs
depends on an ultrathin, conformal electrolyte layer to electrically
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