Lecture 6 Channel cracks in thin films

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Submitted by Zhigang Suo on Mon, 2007-02-19 20:50.

Various cracks in thin films under tensile or compressive stresses
Micrographs of cracks in thin films
A micrograph of a channel crack
The origin of stress in a film
Stress in a thin film due to mismatch in the coefficients of thermal expansion
Stress in film due to bending
Measure redisual stress using wafer curvature
Channel crack: initiation vs. steady propagation
Steady-state energy release rate of a channel crack
Channel crack in patterned structure
Fracture mechanics as a division of labor
Small structures: a new economy
Moisture-assisted crack growth
A method to measure G. G-meter
Measure crack driving force due to residual stress field

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